Figure 1

SOL design and diffraction patterns in longitudinal cross-section.

(a), SEM image of the super-oscillatory lens with diameter of 40 µm, which is divided into 100 rings in the radial direction with smallest annulus width of 200 nm. The focal length and DOF are designed to 10 µm and 4 µm respectively. The sample was fabricated by focused ion beam onto a 100 nm-thick gold film deposited on a glass substrate using thermal evaporation; (b), Zoom-in view of the area within the blue dashed box in a, the standard deviation of the measured ring-width is less than 10 nm compared with the design; (c), (d), Experimental and simulated intensity of the diffraction patterns within propagation distance of 20 µm respectively.