Figure 4
Various reactive species and ozone monitoring in Type 2.
(A) Optical emission spectrum of the plasma plume from 250 nm to 850 nm observed in the helium/oxygen plasma at the applied voltage 1.7 kVpp, repetition frequency 50 kHz and duty ratio 10%. (B) Comparisons of the change of the emission intensities from NO, OH, Hα, O radicals in different oxygen flow rates increasing from 0 to 100 SCCM. (C) The intensity ratios of the lines from NO, OH, Hα, O radicals to the helium line (706 nm). (D) Measurement of ozone concentration for different oxygen flow rates increasing from 0 to 20 SCCM.
