Figure 3

I-V characteristics of the quartz-substrate-based nanopore measured as a function of applied bias for various size pores in (a) 20-nm-thick and (b) 5-nm-thick SiNx membranes.

(c) Ionic conductance versus nanopore diameter for various SiN_x membrane thicknesses: 20 nm (red), 10 nm (green) and 5 nm (blue). Each dotted line and the effective thickness were achieved by fitting with Equation 1, as described in the text.