Figure 3

Cross-sectional TEM views of (a) bright and (b) STEM-HAADF images of the interfacial region between the drain electrode and channel layer for the IGZO-TFT. EDS spectra at the ITO electrode and interfacial regions, which were defined as an electrode area near the channel layer, (c) for the IGZO-TFT and (d) IGO-TFT before and after the DBS.