Table 1 Temperature effect on UV sensing performance of the new FBAR device under a UV light an intensity of 0.4 mW/cm2
From: UV sensing using film bulk acoustic resonators based on Au/n-ZnO/piezoelectric-ZnO/Al structure
Temperature (°C) | 30 | 55 | 80 | 105 |
Δfr (kHz) | 69 | 51 | 21 | 13 |
