Table 1 The values of strain energy (E∈ and ES) under different compressive strain, where E∈ is the strain energy calculated at the strain ∈. ES is the strain energy calculated by substracting the total energy of the strained system from the equilibrium total energy

From: Probing the intrinsic failure mechanism of fluorinated amorphous carbon film based on the first-principles calculations

Strain

Strain energy (E∈) (eV)

Strain energy (ES) (eV)

0

−10920.07

0

−0.02

−10920.04

0.03

−0.05

−10919.57

0.5

−0.1

−10918.27

1.8

−0.15

−10915.42

4.65

−0.2

−10910.48

9.59

−0.25

−10904.91

15.16

−0.3

−10911.90

8.17

−0.35

−10917.15

2.92

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