Figure 1
From: Si-rich SiNx based Kerr switch enables optical data conversion up to 12 Gbit/s
The configuration of the Si-rich SiNx waveguide based nonlinear Kerr switch and the structural analyses of Si-rich SiNx.
(a) The optical microscopy (OM) image and (b) the scanning electron microscopy (SEM) image of the Si-rich SiNx waveguide based nonlinear Kerr switch. (c) The full-band XPS spectrum of the Si-rich SiNx film with relative Si and N composition ratios. (d) The Raman scattering spectrum of the Si-rich SiNx film with decomposed functions related to a-Si, Si-QD and c-Si components. Inset: the HRTEM cross-section-view image of the Si-rich SiNx film.
