Figure 1
EBID dielectric nano-rod antenna.
(a) Schematic of the EBID procedure used to form a 3D nano-rod antenna. Vaporized oil molecules (octadecyl-naphthalene) from the diffusion pump function as precursor gas. (b) SEM (left) and AFM (right) images of a fabricated EBID carbonaceous dielectric nano-rod antenna. The height, width and length are 170 nm, 170 nm and ~4.5 μm, respectively. The scale bars are 100 nm. (c) Cross-sectional views of the selected nano-rod antennas measured by AFM. The height changes from 90 to 240 nm. (d) Measured refractive index (left axis; red circles) and extinction coefficient (right axis; blue circles) of an EBID block, using spectroscopic ellipsometry (see Supplementary Figure S2). The block was fabricated under the same conditions as the EBID dielectric nano-rod antenna at a current of ~130 pA. The experimental data were fitted to the CP model (red and blue solid curves).
