Figure 3
From: Direct growth of freestanding GaN on C-face SiC by HVPE

SEM images of cross-section of LT-GaN buffer before annealing (a) and after annealing (b), backside of freestanding GaN (c).
From: Direct growth of freestanding GaN on C-face SiC by HVPE
SEM images of cross-section of LT-GaN buffer before annealing (a) and after annealing (b), backside of freestanding GaN (c).