Figure 3

Characterization of optimized-FsLDW-fabricated protein-based true 3D WGM microlasers (2.5-μm designed thickness of upper-part microdisks) by OM, SEM and AFM.

(a) The protein-based 3D WGM microdisk with diameter of 30 μm. 1, top-view OM image; 2, top-view SEM image; 3, SEM partial enlarged detail of image 2. Scale bars, 1 and 2, 10 μm; 3, 1 μm. (b) The protein-based 3D WGM microdisk with diameter of 40 μm. 1, top-view OM image; 2, top-view SEM image; 3, SEM partial enlarged detail of image 2. Scale bars, 1 and 2, 10 μm; 3, 1 μm. (c) The protein-based 3D WGM microdisk with diameter of 60 μm. 1, top-view OM image; 2, top-view SEM image; 3, SEM partial enlarged detail of image 2. Scale bars, 1 and 2, 10 μm; 3, 1 μm. (d) Schematic illusration of true 3D WGM microdisk FsLDW-fabricated with partly conformal scanning mode. (e) AFM characterization of protein-based microdisks (1, 30-μm diameter; 2, 40-μm diameter) without bottums. Scale bar, 10 μm. (f) 1, SEM image of a 75° tilted protein-based true-3D microdisk with a 60-μm diameter, scale bar, 10 μm; 2, SEM enlarged view of image 1, scale bar, 1 μm.