Figure 3

The plot of the etch rate versus the pulse delay at a laser fluence of 9.46 J/cm2 and pulse energy distribution ratio of 1:1 (the etch time is 90 min).

The plot of the etch rate versus the pulse delay at a laser fluence of 9.46 J/cm2 and pulse energy distribution ratio of 1:1 (the etch time is 90 min).