Figure 4

EPD measurement.
SEM images of EPs on the top surface of the n-GaN layer in the InGaN/GaN LEDs grown on the ALD compliant BL (a) and MOCVD NL (b).
EPD measurement.
SEM images of EPs on the top surface of the n-GaN layer in the InGaN/GaN LEDs grown on the ALD compliant BL (a) and MOCVD NL (b).