Figure 5
XRD of the GaN epilayers.
XRD rocking curves of (a) the symmetrical (002) and (b) symmetrical (102) reflections of the GaN epilayers grown on the ALD compliant BL and MOCVD NL.
Figure 5 | Scientific Reports
XRD of the GaN epilayers.
XRD rocking curves of (a) the symmetrical (002) and (b) symmetrical (102) reflections of the GaN epilayers grown on the ALD compliant BL and MOCVD NL.
