Figure 5 | Scientific Reports

Figure 5

From: Stacked 3D RRAM Array with Graphene/CNT as Edge Electrodes

Figure 5

(a) Schematic diagram of 3D Ta2O5-x/TaOy RRAM with CNT edge electrode; (b) TEM image of CNT with a diameter about 2.5nm; (c) The top view SEM image of the drilled hole after etching SiO2 layer without damaging the CNT electrode and (d) the metal contact Sc deposited on CNT; (e) The fabrication flow of the single 3D RRAM cell.

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