Figure 2
From: Integrated active sensor system for real time vibration monitoring
On-off state monitoring and working amplitude monitoring of nine vibrating units.
(a) Schematic diagram of the fabricated array sensor. (b) The output of a single unit under off-state and on-state. (c,d) Measured mapping figures with different amounts of units in off-state. (e) The output of a vibrating unit with different vibration amplitudes. (f) Dependence of the output voltage on the vibration amplitude. (g,h) Measured mapping figures with the working amplitudes of different amounts of units deviated from normal set value.
