Figure 1

(a) Schematic of the parallel near-field scanning optical lithography (NSOL) system. (b) Schematic of NSOL mask with a flat island of protrusion. (c) SEM image of an island milled with an array of bowtie apertures. (d) Zoom-in SEM image of the bowtie aperture array. Inset is the SEM image of an individual bowtie aperture. (a,b) were drawn by X.W.