Figure 2

Working distance optimization.
(a) AFM image of lines produced with various mask-substrate distance: A: 0 nm, B: 5 nm, C: 10 nm, D: 15 nm, E: 20 nm. (b) Cross section of a line produced with 10-nm mask-substrate distance.
Working distance optimization.
(a) AFM image of lines produced with various mask-substrate distance: A: 0 nm, B: 5 nm, C: 10 nm, D: 15 nm, E: 20 nm. (b) Cross section of a line produced with 10-nm mask-substrate distance.