Figure 3

(a) AFM image of lithography result of letters “bnc” with alignment using ISPI technique, (b) the cross sectional profile of the line pattern. (c) A typical lithography results of letters “bnc” without using ISPI alignment.

(a) AFM image of lithography result of letters “bnc” with alignment using ISPI technique, (b) the cross sectional profile of the line pattern. (c) A typical lithography results of letters “bnc” without using ISPI alignment.