Figure 3
Film thickness and spatial resolution at 18 cm/s of a polyimide sample with a known dielectric constant and conductivity.
(a) The frequency shift relative to the empty cavity (top) and quality factor (bottom) for the empty cavity (black line), polyimide belt (orange) and polyimide staircase (blue) performed at 10 GHz with a belt speed of 18 cm/s. (b) The relative frequency shift (yr) on the top and the sample damping ratio (yi) on the bottom versus effective sample volume (x)18. The slopes of the solid black lines are related to the complex permittivity (Methods). (c) The sample thickness versus position, using the frequency shift (top, a) and computed dielectric constant (top, b). The thicknesses calculated in (c) agreed with measurements made with a caliper. The uncertainty (black) was determined by error propagation of the measured sample dimensions and voltage signal.
