Figure 1

Structures of the oblique deposited CFB films.
(a) XRD results for CFB thin films with different oblique deposition angle and (b) cross-sectional image of CFB thin films deposited at 70 °.
Structures of the oblique deposited CFB films.
(a) XRD results for CFB thin films with different oblique deposition angle and (b) cross-sectional image of CFB thin films deposited at 70 °.