Figure 6

Schematic diagram of the sputtering arrangement.
A FeCoB target was used to deposit the thin films. The Si was place on the upholder with different incident angle from 10° to 70°.Easy axis of the films are marked with the red arrow.
Schematic diagram of the sputtering arrangement.
A FeCoB target was used to deposit the thin films. The Si was place on the upholder with different incident angle from 10° to 70°.Easy axis of the films are marked with the red arrow.