Figure 2

TIN criterion for copper metal plotted as a function of the laser pulse duration and the copper layer thickness.

The lower limit curve (blue) is obtained from Eq. 1 with D = 1.1 cm²/s, λ = 532 nm and κ = 2.59. The upper limit (green curve) is obtained using Eq. 2 (see Supplement). The experimental results (red diamonds) obtained under conditions described in relation to in Fig. 3.