Figure 2
From: Electrolithography- A New and Versatile Process for Nano Patterning
Elemental analysis of the regions inside and outside of the flow affected region.
(a) Atomic percentage of nitrogen, chromium and oxygen in different regions. Area 1 and area 3 are completely outside and inside the flow affected region, respectively, whereas spots 2 and 2’ are marginally outside and inside of the periphery of the flow affected region, respectively. Area-scans were conducted in the rectangular zones marked as 1 and 3 whereas point-scans were conducted at the centers of the cross-marks denoted as points 2 and 2’. High-resolution XPS spectra of Cr 2P orbital (b) inside and (c) outside the flow affected region. Thick black line is the actual data and the thin lines are the fitted curves.
