Figure 1

Fits of the O 1s (a) and C 1s (b) XPS spectra obtained from the SiOx/Si(100) substrate (bottom panels) and Ni/NiOx films grown ontop by PSE-CVD from 2.5 mM Ni(acac)2 in ethanol and with various water concentrations (0.0%, 0.5%, 4.0% and 10.0 vol%) in the precursor solution at a substrate temperature of 270 °C.