Figure 7
XPS spectra in the binding energy range of (a) Co 2p, (b) O 1s and (c) C 1s emissions obtained from the Ni/SiOx/Si(100) substrate (dotted curves) and from Co/CoOx films (thickness 100–150 nm) grown ontop by PSE-CVD from 7.5 mM precursor solution with 0.0% and 1.0 vol% water concentrations at a substrate temperature of 310 °C (solid lines).
