Figure 1 | Scientific Reports

Figure 1

From: Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers

Figure 1

(a) TEM image of the as-deposited films with the individual layer thickness 5 nm. (b) A magnified HRTEM image of the as-deposited films showing crystal structures of Al-AlN-TiN trilayers. (c) A magnified HRTEM image of the deformed film showing crystal structures of Al-AlN-TiN trilayers. The white dashed lines indicate the interface between the TiN and Al. The yellow dashed lines indicate the Al and AlN interface and the AlN and TiN interface.

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