Figure 3
From: Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers
(a) TEM image of the as-deposited Al-AlN-TiN trilayer. The AlN layer has the zinc blende structure, as be magnified in (b–e) the measurements of lattice parameters in the TiN, z-AlN and Al layers.
