Figure 4
From: Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers
Phase transformation in the AlN layer.
HRTEM images are from in situ indentation test. (a) One HRTEM image shows the heterogeneous phase transformation in the AlN layer. WZ and ZB indicate the w-AlN and z-AlN phase. (b–e) HRTEM images of four snapshots of the region outlined in the blue rectangle in (a), showing the w-AlN nucleated and propagate towards the right direction. A sharp interface between the w-AlN and z-AlN was observed in all images and magnified in (d’).
