Figure 1

AFM images of AZO seed layer thin film, scanning area: 2 μm × 2 μm, 2D image (a) and 3D image (b). Inset in (a) is digital image of AZO seed layer on glass substrate. (c) Survey XPS spectrum of the AZO seed layer. (d–f) XPS spectrums of the Zn 2P, O1s and Al 2P core level regions and their Gaussian-resolved results, respectively.