Figure 2
Fabrication process flow to form an artificial MEMS superficial neuromast: (a) A schematic showing an exploded view of various fabrication processes and the materials used in fabrication. (b) A photograph showing 25 mm disc of swollen HA-MA hydrogel undergoing rheology test. (c) Electrospun nanofibril scaffold showing aligned nanofibers bridging the distal tip of the hair cell to the perimeter of the sensor. These nanofibrils act as a scaffold during the hydrogel formation and also enhance the mechanical strength of the hydrogel. (d) Naked hair cell sensor (without the cupula dressing) featuring a high-aspect ratio stereolithographically printed polymer hair cell (e) Top and bottom views of LCP sensing base. 25 μm thick LCP membrane is defined by etching the silicon support wafer to which it is bonded (f) An optical image of the bond interface between silicon and LCP using an intermediate SU-8 layer (g) The artificial cupula sensor after forming the hydrogel cupula. (Image (b) was taken by Meghali Bora. Images (c–g) were taken by Ajay Giri Prakash Kottapalli and Mohsen Asadnia. Images were edited by Ajay Giri Prakash Kottapalli and Mohsen Asadnia).
