Figure 1
From: Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft x-ray radiation
Three-dimensional XCT image of a silicon-based sample with different buried layers of gold.
The nano-structures are clearly resolved inside the silicon host material (see also Fig. 4). The depth structure was reconstructed by analyzing the spectral interferogram. Due to the short coherence length of the applied XUV radiation, the axial resolution is better than 18 nm. Lateral imaging was achieved by scanning the focused XUV beam over the sample with a lateral resolution of 200 μm. This can be improved by using spatially coherent XUV sources and XUV optics of highest quality.
