Figure 2
From: Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft x-ray radiation
Implementations of XCT as a common-path frequency-domain OCT scheme.
The broadband XUV radiation is focused on the sample using an incidence angle of 15° in respect to the sample’s normal. In this setup, an aperture can be used for spatial filtering and enhancing the lateral resolution at the expense of radiation flux. The scattered radiation is recorded with an efficient spectrometer consisting of a focusing mirror, a transmission grating (1000 lines/mm) and a CCD (Back-illuminated XUV-CCD, pixel size 13.5 μm, 2048 × 512 pixels). When the wavelength of the incident XUV radiation is swept, the spectrometer can be replaced by a photo diode as a detector.
