Figure 3

XCT signals in silicon- and water transmission window.

(a) Recorded reflected spectral intensity in the silicon transmission window from 30–100 eV (40–12 nm) of the layer system (c). The blue dots correspond to the CCD-cameras pixels the red curve is the interpolation. The grey curve is the used spectral window for suppression of Fourier artifacts. (b) Reconstructed depth profile: The two gold layers appear clearly separated, thus the resolution is better than 18 nm. The first peak at 16.7 nm is a ghost peak and corresponds to the distance between the two real depths. (d) Recorded reflected spectral intensity in the water window 280–530 eV (4.4–2.3 nm) of the layer system (f). The blue dots correspond to the energy measurement discretization and the red curve is the interpolation. The grey curve is the used spectral window for suppression of Fourier artifacts. (e) Reconstructed depth profile: The front and backside of the platinum layer appear separated, thus the resolution is better than 8 nm. The first peak at 7.7 nm is a ghost peak and corresponds to the difference between the two real depths.