Figure 4

(a) The FWHM of the off-axis XRC of (11–22) GaN as a function of the azimuthal angle, Φ. (b) The FWHMs of m-plane (n0-n0) XRCs (n = 1, 2 and 3). (c) The FWHMs of c-plane (000n) XRCs (n = 2, 4 and 6).
(a) The FWHM of the off-axis XRC of (11–22) GaN as a function of the azimuthal angle, Φ. (b) The FWHMs of m-plane (n0-n0) XRCs (n = 1, 2 and 3). (c) The FWHMs of c-plane (000n) XRCs (n = 2, 4 and 6).