Figure 2
From: Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy
Experimental set-up.
(a) SEM image of pristine device active junction. (b) SEM images of final thin lamella. (c) Lamella orientation for the TXM-NEXAFS experiment. (d) Schematic of the TXM for NEXAFS experiment.
