Figure 3
From: Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy
Optical density TXM micrographs of the PRI case obtained using X-ray photon energy of 450 eV (a) and 465 eV (b) and Ti 2p (c) and O 1 s (d) NEXAFS spectra extracted from the TiOx film. Scale bar = 200 nm.
