Figure 4
From: Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy
(a) Optical and (b) AFM images viewed from the TE. Inset in (b) line profile of the protrusion. (c) SEM image of lamella cut location and in inset detail of lamella extraction. (d) Thinned lamella with details of the damaged region. (e) Cross-section SEM image of the damaged region. Scale bar (a–c) 10 μm; (d) 1 μm; (e) 200 nm.
