Figure 6
From: Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy

Chemical maps depicting regions of amorphous and reduced TiOx.
Components maps at the Ti 2p (a,b) and at the O 1 s (c,d). Scale bar = 100 nm.
From: Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy

Chemical maps depicting regions of amorphous and reduced TiOx.
Components maps at the Ti 2p (a,b) and at the O 1 s (c,d). Scale bar = 100 nm.