Figure 7
From: Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy
Physicochemical characterization of a RRAM device programmed in LRS
. Color-coded composition maps at the Ti 2p and O 1 s generated independently (d,e) and simultaneously (f) by using the absorption spectra of the two components, TiOx amorphous (blue) and TiOx reduced (green) shown in (a–c). Scale bar = 100 nm.
