Figure 6
From: Improved p-type conductivity in Al-rich AlGaN using multidimensional Mg-doped superlattices

SIMS depth profiles of Mg, Al, and H atoms in sample A (a) and sample B (b). (c) Ratio between Mg–H concentration and Mg concentration.
From: Improved p-type conductivity in Al-rich AlGaN using multidimensional Mg-doped superlattices
SIMS depth profiles of Mg, Al, and H atoms in sample A (a) and sample B (b). (c) Ratio between Mg–H concentration and Mg concentration.