Figure 2
Optical images of surface morphologies after fixed-abrasive lapping (a,b) by alumina with a size of 5 μm and CMP (c,d) using slurry consisting of SiO2 and H2O2 with a volume ratio of 5:1.
Figure 2 | Scientific Reports
Optical images of surface morphologies after fixed-abrasive lapping (a,b) by alumina with a size of 5 μm and CMP (c,d) using slurry consisting of SiO2 and H2O2 with a volume ratio of 5:1.
