Figure 4 | Scientific Reports

Figure 4

From: In-situ Observation of Cross-Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation

Figure 4

Cross-sectional distributions of TiN 200FWHMδ(y, z)observed during the indentation with a load of 1.4N.

The local increase in out-of-plane FWHM90(y, z) (a) and in-plane FWHM0(y, z) (b) correlates well with the concentrations of out-of-plane and in-plane stress components σ22(y, z) and σ33(y, z) in Fig. 6. Different FWHM90(y, z) and FWHM0(y, z) in FUP and FLP regions demonstrate the presence of needle-like crystallite morphology as well as an abrupt change in the film microstructure at the FUP/FLP interface.

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