Figure 5
Development of the TiN (200) lattice spacing for various orientations of the diffraction vector 
and for cross-sectional sample positions y = −3 and z = 1 μm.
The filled and open points represent σ11(−3, 1) data from unloaded and sample loaded with 1.4N force. The split dependencies from the loaded sample indicate a presence of σ23(y, z). Cross-sectional 
dependencies are available as supplementary Figs 5 and 6.
