Figure 7
Experimental stress distributions σ22(y, z), σ23(y, z) and σ33(y, z) at the positions y, z in the 9 μm thick TiN film loaded with 1.4 N.
The stress concentrations and distributions can be correlated with fracture modes visible in Fig. 2a as well as with the FWHMδ(y, z) values in Fig. 4. Due to presentation reasons, the actual magnitude of the shear stresses σ33(y, z) is shown as −|σ33(y, z)|.
