Table 1 Technical specification of the precision translation stage.
Stiffness in motion direction | [N/μm] | 3500 |
Load capacity | [N] | 200 |
Push/pull force | [N] | 50 |
Lateral force | [N] | 100 |
Resolution | [μm] | 0.018 |
Min. incremental motion | [μm] | 0.2 |
Backlash | [μm] | 10 |
Unidirectional repeatability | [μm] | 1 |