Figure 1

Morphological analyses of original pattern, deformed pattern under different tensile strains and recovered pattern.
(a) 200 nm-grating, (b) 2 μm-grating, (c) 250 nm-pillars and (d) 200 nm-holes. Left: topographic AFM images; Centre: corresponding height profiles from AFM images; Right: top-view SEM images. Note that the scales for x- and y-axes in the height profiles of AFM are different so as to clearly present the values of dimensions on surface topographies.