Figure 7
(a) X-ray photoemission spectroscopy (XPS) analyses on films A through D. The nitrogen 1 s peaks were observed for each film, while film E was excluded since it does not contain any detectable level of nitrogen. The N 1 s peaks were deconvoluted into three different sub-peaks, each located at 395.8 eV, 396.5 eV, and 398.3 eV. The lowest energy sub-peak at 395.8 eV originates from nitrogen atoms in N-rich zinc nitride, while the middle sub-peak at 396.5 eV arises from the nitrogen atoms in stoichiometric Zn3N2. The highest energy sub-peak at 398.3 eV represents mostly N-N bonds. (b) The relative intensity ratios of the sub-peaks in films A through D.
