Figure 5
(a) The SEM image of the total fabricated side-coupled semi-2D-PhC cavity. (b) The local zoom-in SEM image of the cavity center. (c) The zoomed-in SEM image of the holder.
Figure 5 | Scientific Reports
(a) The SEM image of the total fabricated side-coupled semi-2D-PhC cavity. (b) The local zoom-in SEM image of the cavity center. (c) The zoomed-in SEM image of the holder.
