Figure 3
From: Nucleation and growth of (10͞11) semi-polar AlN on (0001) AlN by Hydride Vapor Phase Epitaxy
ECS model.
(a) When the growth temperature is high enough, AlN grows along [0001] direction and (0001) is the facet on surface. (b) Other facet on surface instead of (0001) occurs while the growth temperature decreases. (c) (
) plane becomes facet on surface when the growth temperature is lower than 1390 °C. (d) (
) twin boundaries formed at the basis of (
) facets on surface.
