Figure 3

Scanning electron micrographs of the fabricated structures (a–c) before Ni removal). (a) Overview of the entire structure showing the dielectric grating couplers and the dielectric waveguides with a short plasmonic waveguide in its middle. The dielectric waveguides not containing a plasmonic waveguide above and below are used as references. (b) Zoom-in showing the plasmonic waveguide and the dielectric-plasmonic transducers. (c) The photonic grating-coupler, consisting of a partially etched grating and a Bragg-reflector. (d) Zoom-in to the photon-to-plasmon transducer with a 40 nm gap between metallic and dielectric components.